Makoto Kambara Associate Professor

TEL +81-3-5841-7099
FAX +81-3-5841-7099
mkambara[at]plasma.t.u-tokyo.ac.jp

* In your correspondence, please replace [at] with "@" in the above email address.

研究室 http://www.plasma.t.u-tokyo.ac.jp/jp/index.htm
研究分野 plasma materials processing, solidification and crystal growth

Research

My research aims at design/development of novel device/processing route, for which functionality and production throughputs are both the requirements equally. This is tackled through material and process control with particular attention to understanding the mechanisms behind in the non-equilibrium plasma environment. The engineering targets have been the energy and environment related applications, such as thin film Si solar cells, lithium ion batteries, gas sensors, thermal barrier coatings, etc. Currently, two major projects are under way. One is to develop wafer quality, single crystal thick film solar cells via highly efficient production approach. This is approached by an exploitation of unique mesoplasma characteristics. Recent achievements are fast rate Si epitaxy at ~700 nm/sec with an improved production yield of >50% from trichlorosilane, and identification of its unique cluster assisted epitaxial growth mechanism. The other project is to engineer nano-sized Si composite powders by the industrial compatible thermal plasma spraying for the next generation lithium ion secondary batteries (LIB) where large charging capacity and longer charge life are the simultaneous requirements. Such rather conflicting functions are to be integrated into Si-(O-)Cx nano composites powders by the control and design of the non-equilibrium co-condensation process from high temperature plasma vapor mixtures.

主要研究論文

R.W. Chen, Y. Shibuta, M. Kambara, and T. Yoshida: “Molecular dynamics simulation of the role of hydrogenated Si clusters for fast rate mesoplasma epitaxy”, J. Phys. D: Appl. Phys. 46 (2013) 425302.
T. Tashiro, M. Dougakiuchi, M. Kambara, "Instantaneous formation of SiOx nanocomposite for high capacity lithium ion batteries by enhanced disproportionation reaction during PS-PVD", Sci. Technol. Adv. Mater. 17 (2016) 744. M. Kambara, T. Hideshima, M. Kaga, T. Yoshida: “Powders: Plasma Spray PVD for high-throughput production”, Ency. Plasma Technol., (2017) 1176.
R. Ohta, M. Dougakiuchi, M. Kambara, "Effect of PS-PVD production throughput on Si nanoparticles for negative elecrode of lithium ion batteries", J. Phys. D: Appl. Phys. 51 (2018) 105501.