Takeshi Momose Lecturer
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+81-3-5841-7131 |
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+81-3-5841-7131 |
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momo[at]dpe.mm.t.u-tokyo.ac.jp
* In your correspondence, please replace [at] with "@" in the above email address. |
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http://www.dpe.mm.t.u-tokyo.ac.jp/index_e.html |
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supercritical fluid deposition (SCFD), physical properties of supercritical fluids, thin film process, metal film, organic/inorganic hybrid material |
Research
Adding and/or improving properties of a material in a limited space calls for more complex internal structures: for instance, minute three-dimensional architecture formed on wafers in electronic and optical applications, and fiber-reinforced composite materials of functional films in structural applications. This creates a demand for the development of novel processes capable of fabricating complex three-dimensional structures, in addition to functional and architectural design based on material science. We therefore work on developing nano-filling and surface coating technologies of functional materials applicable to complex three-dimensional structures, especially supercritical fluid deposition (SCFD) that exploits chemical reactions in supercritical fluid.
主要研究論文
Y. Zhao, K. Jung, Y. Shimogaki, and T. Momose: "Kinetic effects of methanol addition on supercritical fluid deposition of TiO2", J. Supercrit. Fluids, 138 (2018) 63-72.
Y. Zhao, Y. Shimoyama, T. Momose, and Y. Shimogaki "Experimental approach to estimate diffusivity of metal organics in supercritical CO2 at high temperatures" J. Supercrit. Fluids, 120 (2017) 209-217.
T. Momose, T. Kamiya, Y. Suzuki, S. Ravasio, C. Cavallotti, M. Sugiyama, and Y. Shimogaki, “Kinetic analysis of GaN-MOVPE via thickness profiles in the gas flow direction with systematically varied growth conditions”, ECS J. Solid State Sci. Technol., 5 (2016) P164-P171.